Diamond growth in a novel low pressure flame

نویسندگان

  • N. G. Glumac
  • D. G. Goodwin
چکیده

Diamond growth using a new low-pressure combustion technique is reported. A large-area hydrogen/oxygen flame is used as the source of atomic hydrogen. Methane diluted in hydrogen is injected into the flame near a heated silicon substrate, on which diamond crystallites nucleate and grow. This technique is potentially capable of large-area film growth, since atomic hydrogen can be generated uniformly over arbitrarily large areas.

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تاریخ انتشار 1999